Web1 jun. 1993 · Abstract. We report on the fabrication of novel refractive microlens ar- rays in photoresists, in particular on lenses with numerical apertures ranging from 0.1 to 0.3. A base layer technique is described that makesit possible to fabricate lower numerical aperture lenses in resist, com-pared with microlenses on glass substrates. The wave aberrations … WebMicrolens. A microlens is a small lens, generally with a diameter less than a millimetre (mm) and often as small as 10 micrometres (µm). The small sizes of the lenses means that a …

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